| Low-flow measurement/control (some types as low as 1 sccm air
and 0.1 mL/min water, max of
range) |
|
|
Mechanical orifice (flow controller)
Thermal dispersion flow meters
Differential pressure flow meters
Flow Indicators/sensors/switches
Turbine (Pelton wheel) flow meters
Variable area flow meters
Gear flow meters
Propeller type (impeller/paddle wheel) flow meters
Magnetic flow meter
Ultrasonic flow meter
Vortex flow meter |