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Brooks Instruments Elastomer Seal Digital Mass Flow Controllers

Change gases and flow rate simply and quickly
  • Native gas calibration is not required
  • Highly corrosion-resistant Hastelloy C-22 sensor tube and sensor for durable, long-term operation
  • Improved reproducibility at elevated temperatures through new isothermal packaging, onboard conditioning electronics with ambient temperature sensing and compensation
  • 1% full-scale accuracy ensures reliable flow control in demanding applications
  • Full-scale flow range can be scaled down typically by a factor of 3:1 with no impact on accuracy
At the heart of these Brooks flow controllers is the MultiFlo™ device, which overcomes a long-standing limitation of many thermal gas controllers when changing gas types. A simple correction factor, such as the ratio of heat capacities between the calibration gas and new gas, cannot account for accuracy — robbing viscosity and density differences. The flow controller''s electronics is built on thousands of native gas runs to establish correction functions that account for both thermal and physical differences among gases.


These Brooks flow controllers are the perfect choice for applications when a variety of gases are used, when a change of gas type is frequent, or re-ranging flow measurement is needed while preserving gas measurement and control accuracy. The enclosed solenoid control valve features elastomer seals and a high purge rate capability. Easily change gas and range via computer and provided software to suit your needs. Diagnose and troubleshoot flow controller via service port and software.

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65 variations of this product are available.

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Gas Type Max Flow Rate (LPM) Min Flow Rate (LPM)
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Brooks GF040 Digital Mass Flow Controller, 3-10 sccm, N2 EW-32618-00 Mfr # GF040CXXC-0013010C-T2PKS4-XXXXAA-20C
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Nitrogen 0.01 0.003
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Brooks GF040 Digital Mass Flow Controller, 31-92 sccm, N2 EW-32618-04 Mfr # GF040CXXC-0013092C-T2PKS4-XXXXAA-20C
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Nitrogen 0.092 0.031
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Brooks GF040 Digital Mass Flow Controller, 2.6-7.2 LPM, N2 EW-32618-10 Mfr # GF040CXXC-00137-2L-T2PKS4-XXXXAA-20C
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Nitrogen 7.2 2.6
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Brooks GF040 Digital Mass Flow Controller, 3-10 sccm, O2 EW-32618-16 Mfr # GF040CXXC-0015010C-T2PKS4-XXXXAA-20C
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Oxygen 0.01 0.003
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Brooks GF040 Digital Mass Flow Controller, 3-10 sccm, Ar EW-32618-32 Mfr # GF040CXXC-0004010C-T2PKS4-XXXXAA-20C
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Argon 0.01 0.003
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Brooks GF040 Digital Mass Flow Controller, 3-10 sccm, He EW-32618-48 Mfr # GF040CXXC-0001010C-T2PKS4-XXXXAA-20C
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Helium 0.01 0.003
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Brooks GF040 Digital Mass Flow Controller, 92-280 sccm, He EW-32618-54 Mfr # GF040CXXC-0001280C-T2PKS4-XXXXAA-20C
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Helium 0.28 0.092
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Brooks GF040 Digital Mass Flow Controller, 281-860 sccm, He EW-32618-56 Mfr # GF040CXXC-0001860C-T2PKS4-XXXXAA-20C
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Helium 0.86 0.281
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Brooks GF040 Digital Mass Flow Controller, 2.6-7.2 LPM, He EW-32618-58 Mfr # GF040CXXC-00017-2L-T2PKS4-XXXXAA-20C
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Helium 7.2 2.6
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Brooks GF040 Digital Mass Flow Controller, 3-10 sccm, H2 EW-32619-00 Mfr # GF040CXXC-0007010C-T2PKS4-XXXXAA-20C
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Hydrogen 0.01 0.003
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Brooks GF040 Digital Mass Flow Controller, 2.6-7.2 LPM, H2 EW-32619-10 Mfr # GF040CXXC-00077-2L-T2PKS4-XXXXAA-20C
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Hydrogen 7.2 2.6
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Brooks GF040 Digital Mass Flow Controller, 3-10 sccm, CO2 EW-32619-16 Mfr # GF040CXXC-0025010C-T2PKS4-XXXXAA-20C
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Carbon Dioxide 0.01 0.003
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Brooks GF040 Digital Mass Flow Controller, 92-280 sccm, CO2 EW-32619-22 Mfr # GF040CXXC-0025280C-T2PKS4-XXXXAA-20C
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Carbon Dioxide 0.28 0.092
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Brooks GF040 Digital Mass Flow Controller, 2.6-7.2 LPM, CO2 EW-32619-26 Mfr # GF040CXXC-00257-2L-T2PKS4-XXXXAA-20C
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Carbon Dioxide 7.2 2.6
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Brooks GF040 Digital Mass Flow Controller, 11-30 sccm, N2O EW-32619-34 Mfr # GF040CXXC-0027030C-T2PKS4-XXXXAA-20C
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Nitrous Oxide 0.03 0.011
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Brooks GF040 Digital Mass Flow Controller, 92-280 sccm, N2O EW-32619-38 Mfr # GF040CXXC-0027280C-T2PKS4-XXXXAA-20C
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Nitrous Oxide 0.28 0.092
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Brooks GF040 Digital Mass Flow Controller, 281-860 sccm, N2O EW-32619-40 Mfr # GF040CXXC-0027860C-T2PKS4-XXXXAA-20C
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Nitrous Oxide 0.86 0.281
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Brooks GF040 Digital Mass Flow Controller, 7.2-15 LPM, N2O EW-32619-44 Mfr # GF040CXXC-00270015L-T2PKS4-XXXXAA-20C
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Nitrous Oxide 15 7.2
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Brooks GF040 Digital Mass Flow Controller, 31-92 sccm, Air EW-32619-52 Mfr # GF040CXXC-0008092C-T2PKS4-XXXXAA-20C
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Air 0.092 0.031
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Brooks GF040 Digital Mass Flow Controller, 15-30 LPM, Air EW-32619-62 Mfr # GF040CXXC-0008030L-T2PKS4-XXXXAA-20C
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Air 30 15
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Showing 1 - 20 of 65

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