Brooks Instruments Elastomer Seal Digital Mass Flow Controllers

Change gases and flow rate simply and quickly
  • Native gas calibration is not required
  • Highly corrosion-resistant Hastelloy C-22 sensor tube and sensor for durable, long-term operation
  • Improved reproducibility at elevated temperatures through new isothermal packaging, onboard conditioning electronics with ambient temperature sensing and compensation
  • 1% full-scale accuracy ensures reliable flow control in demanding applications
  • Full-scale flow range can be scaled down typically by a factor of 3:1 with no impact on accuracy
At the heart of these Brooks flow controllers is the MultiFlo™ device, which overcomes a long-standing limitation of many thermal gas controllers when changing gas types. A simple correction factor, such as the ratio of heat capacities between the calibration gas and new gas, cannot account for accuracy — robbing viscosity and density differences. The flow controller''s electronics is built on thousands of native gas runs to establish correction functions that account for both thermal and physical differences among gases.


These Brooks flow controllers are the perfect choice for applications when a variety of gases are used, when a change of gas type is frequent, or re-ranging flow measurement is needed while preserving gas measurement and control accuracy. The enclosed solenoid control valve features elastomer seals and a high purge rate capability. Easily change gas and range via computer and provided software to suit your needs. Diagnose and troubleshoot flow controller via service port and software.

$2,101.00 - $2,430.00USD / Each

64 variations of this product are available.

See All Product Options Below
64 PRODUCT OPTIONS
  • filter by:
Compareitem specifications
Gas Type Max Flow Rate (LPM) Min Flow Rate (LPM)
Availability Pricing
Brooks GF040 Digital Mass Flow Controller, 11-30 sccm, N2 EW-32618-02 Mfr # GF040CXXC-0013030C-T2PKS4-XXXXAA-20C
COMPARE
Nitrogen 0.03 0.011
$2,101.00USD / Each
Brooks GF040 Digital Mass Flow Controller, 281-860 sccm, N2 EW-32618-08 Mfr # GF040CXXC-0013860C-T2PKS4-XXXXAA-20C
COMPARE
Nitrogen 0.86 0.281
$2,101.00USD / Each
Brooks GF040 Digital Mass Flow Controller, 3-10 sccm, O2 EW-32618-16 Mfr # GF040CXXC-0015010C-T2PKS4-XXXXAA-20C
COMPARE
Oxygen 0.01 0.003
$2,430.00USD / Each
Brooks GF040 Digital Mass Flow Controller, 31-92 sccm, O2 EW-32618-20 Mfr # GF040CXXC-0015092C-T2PKS4-XXXXAA-20C
COMPARE
Oxygen 0.092 0.031
$2,101.00USD / Each
Brooks GF040 Digital Mass Flow Controller, 7.2-15 LPM, O2 EW-32618-28 Mfr # GF040CXXC-00150015L-T2PKS4-XXXXAA-20C
COMPARE
Oxygen 15 7.2
$2,101.00USD / Each
Brooks GF040 Digital Mass Flow Controller, 15-30 LPM, O2 EW-32618-30 Mfr # GF040CXXC-0015030L-T2PKS4-XXXXAA-20C
COMPARE
Oxygen 30 15
$2,101.00USD / Each
Brooks GF040 Digital Mass Flow Controller, 3-10 sccm, Ar EW-32618-32 Mfr # GF040CXXC-0004010C-T2PKS4-XXXXAA-20C
COMPARE
Argon 0.01 0.003
$2,430.00USD / Each
Brooks GF040 Digital Mass Flow Controller, 31-92 sccm, Ar EW-32618-36 Mfr # GF040CXXC-0004092C-T2PKS4-XXXXAA-20C
COMPARE
Argon 0.092 0.031
$2,101.00USD / Each
Brooks GF040 Digital Mass Flow Controller, 2.6-7.2 LPM, Ar EW-32618-42 Mfr # GF040CXXC-00047-2L-T2PKS4-XXXXAA-20C
COMPARE
Argon 7.2 2.6
$2,101.00USD / Each
Brooks GF040 Digital Mass Flow Controller, 7.2-15 LPM, Ar EW-32618-44 Mfr # GF040CXXC-00040015L-T2PKS4-XXXXAA-20C
COMPARE
Argon 15 7.2
$2,101.00USD / Each
Brooks GF040 Digital Mass Flow Controller, 92-280 sccm, He EW-32618-54 Mfr # GF040CXXC-0001280C-T2PKS4-XXXXAA-20C
COMPARE
Helium 0.28 0.092
$2,101.00USD / Each
Brooks GF040 Digital Mass Flow Controller, 2.6-7.2 LPM, H2 EW-32619-10 Mfr # GF040CXXC-00077-2L-T2PKS4-XXXXAA-20C
COMPARE
Hydrogen 7.2 2.6
$2,101.00USD / Each
Brooks GF040 Digital Mass Flow Controller, 11-30 sccm, CO2 EW-32619-18 Mfr # GF040CXXC-0025030C-T2PKS4-XXXXAA-20C
COMPARE
Carbon Dioxide 0.03 0.011
$2,101.00USD / Each
Brooks GF040 Digital Mass Flow Controller, 31-92 sccm, CO2 EW-32619-20 Mfr # GF040CXXC-0025092C-T2PKS4-XXXXAA-20C
COMPARE
Carbon Dioxide 0.092 0.031
$2,101.00USD / Each
Brooks GF040 Digital Mass Flow Controller, 92-280 sccm, CO2 EW-32619-22 Mfr # GF040CXXC-0025280C-T2PKS4-XXXXAA-20C
COMPARE
Carbon Dioxide 0.28 0.092
$2,101.00USD / Each
Brooks GF040 Digital Mass Flow Controller, 2.6-7.2 LPM, CO2 EW-32619-26 Mfr # GF040CXXC-00257-2L-T2PKS4-XXXXAA-20C
COMPARE
Carbon Dioxide 7.2 2.6
$2,101.00USD / Each
Brooks GF040 Digital Mass Flow Controller, 31-92 sccm, N2O EW-32619-36 Mfr # GF040CXXC-0027092C-T2PKS4-XXXXAA-20C
COMPARE
Nitrous Oxide 0.092 0.031
$2,101.00USD / Each
Brooks GF040 Digital Mass Flow Controller, 15-30 LPM, N2O EW-32619-46 Mfr # GF040CXXC-0027030L-T2PKS4-XXXXAA-20C
COMPARE
Nitrous Oxide 30 15
$2,101.00USD / Each
Brooks GF040 Digital Mass Flow Controller, 31-92 sccm, Air EW-32619-52 Mfr # GF040CXXC-0008092C-T2PKS4-XXXXAA-20C
COMPARE
Air 0.092 0.031
$2,101.00USD / Each
Brooks GF040 Digital Mass Flow Controller, 92-280 sccm, Air EW-32619-54 Mfr # GF040CXXC-0008280C-T2PKS4-XXXXAA-20C
COMPARE
Air 0.28 0.092
$2,101.00USD / Each
Showing 1 - 20 of 64

Need Help with this product?

Our specialists are here to help you find the best product or part available for your application. Call or Email us and we will make sure you get the right product or part for the job.

Call Us At1-800-323-4340
Live chat